Working Principle of the Hollow-Anode Plasma Source
Date Published |
11/1995
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Publication Type | Journal Article
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Authors | |
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DOI |
10.1088/0963-0252/4/4/008
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LBL Report Number |
LBL-36240
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Abstract |
The hollow-anode discharge is a special form of glow discharge. It is shown that a drastically reduced anode area is responsible for a positive anode voltage drop of 30-40 V and an increased anode sheath thickness. This leads to ignition of a relatively dense plasma in front of the anode hole. Langmuir probe measurements inside a specially designed hollow anode plasma source give an electron density and temperature of ne=109-1011 cm-3 and Te=1-3 eV, respectively (nitrogen, current 100 mA, flow rate 5-50 scc min-1). Driven by a pressure gradient, the 'anode' plasma is blown through the anode hole and forms a bright plasma jet streaming with supersonic velocity (Mach number 1.2). The plasma-stream can be used, for instance, in plasma-assisted deposition of thin films. |
Journal |
Plasma Source Science and Technology
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Volume |
4
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Year of Publication |
1995
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Issue |
4
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Pagination |
571-575
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Other Numbers |
UC-426
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Custom 1 |
<p>Windows and Daylighting Group</p>
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Short Title |
Plasma Sources Sci. Technol.
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Organizations | |
Research Areas | |
File(s) | |
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