%0 Journal Article
%A André Anders
%A Simone Anders
%B Plasma Source Science and Technology
%D 1995
%G eng
%N 4
%P 571-575
%R 10.1088/0963-0252/4/4/008
%T Working Principle of the Hollow-Anode Plasma Source
%V 4
%1 <p>Windows and Daylighting Group</p>
%2 LBL-36240
%8 11/1995
%! Plasma Sources Sci. Technol.
%X <p>The hollow-anode discharge is a special form of glow discharge. It is shown that a drastically reduced anode area is responsible for a positive anode voltage drop of 30-40 V and an increased anode sheath thickness. This leads to ignition of a relatively dense plasma in front of the anode hole. Langmuir probe measurements inside a specially designed hollow anode plasma source give an electron density and temperature of n<sub>e</sub>=10<sup>9</sup>-10<sup>11</sup> cm<sup>-3</sup> and T<sub>e</sub>=1-3 eV, respectively (nitrogen, current 100 mA, flow rate 5-50 scc min<sup>-1</sup>). Driven by a pressure gradient, the 'anode' plasma is blown through the anode hole and forms a bright plasma jet streaming with supersonic velocity (Mach number 1.2). The plasma-stream can be used, for instance, in plasma-assisted deposition of thin films.</p>