@article{24508,
  author = {André Anders and Simone Anders},
  title = {Working Principle of the Hollow-Anode Plasma Source},
  abstract = {<p>The hollow-anode discharge is a special form of glow discharge. It is shown that a drastically reduced anode area is responsible for a positive anode voltage drop of 30-40 V and an increased anode sheath thickness. This leads to ignition of a relatively dense plasma in front of the anode hole. Langmuir probe measurements inside a specially designed hollow anode plasma source give an electron density and temperature of n<sub>e</sub>=10<sup>9</sup>-10<sup>11</sup> cm<sup>-3</sup> and T<sub>e</sub>=1-3 eV, respectively (nitrogen, current 100 mA, flow rate 5-50 scc min<sup>-1</sup>). Driven by a pressure gradient, the 'anode' plasma is blown through the anode hole and forms a bright plasma jet streaming with supersonic velocity (Mach number 1.2). The plasma-stream can be used, for instance, in plasma-assisted deposition of thin films.</p>},
  year = {1995},
  journal = {Plasma Source Science and Technology},
  volume = {4},
  pages = {571-575},
  month = {11/1995},
  doi = {10.1088/0963-0252/4/4/008},
  language = {eng},
}