Observation of Self-Sputtering in Energetic Condensation of Metal Ions
Publication Type | Journal Article
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LBL Report Number |
LBNL-55876
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Abstract |
The condensation of energetic metal ions on a surface may cause self-sputtering even in the absence of substrate bias. Charge-state-averaged self-sputtering yields were determined for both zirconium and gold ions generated by a cathodic vacuum arc. Films were deposited on differently biased substrates exposed to streaming Zr and Au vacuum arc plasma. The self-sputtering yields for both metals were estimated to be about 0.05 in the absence of bias, and exceeding 0.5 when bias reached - 50 V. These surprisingly high values can be reconciled with binary collision theory and molecular dynamics calculations taking high the kinetic and potential energy of vacuum arc ions into account. |
Journal |
Applied Physics Letters
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Volume |
85
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Year of Publication |
2004
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Number |
25
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Pagination |
6137-6139
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Call Number |
LBNL-55876
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Custom 1 |
<p>Windows and Daylighting Group</p>
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Organizations | |
Research Areas | |
File(s) | |
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