@article{23859,
  author = {André Anders},
  title = {Observation of Self-Sputtering in Energetic Condensation of Metal Ions},
  abstract = {<p>The condensation of energetic metal ions on a surface may cause self-sputtering even in the absence of substrate bias. Charge-state-averaged self-sputtering yields were determined for both zirconium and gold ions generated by a cathodic vacuum arc. Films were deposited on differently biased substrates exposed to streaming Zr and Au vacuum arc plasma. The self-sputtering yields for both metals were estimated to be about 0.05 in the absence of bias, and exceeding 0.5 when bias reached - 50 V. These surprisingly high values can be reconciled with binary collision theory and molecular dynamics calculations taking high the kinetic and potential energy of vacuum arc ions into account.</p>},
  year = {2004},
  journal = {Applied Physics Letters},
  volume = {85},
  number = {25},
  pages = {6137-6139},
  language = {eng},
}