Heat transfer in excimer laser melting of thin polysilicon layers

Publication Type	Journal Article

Authors	Xianfan Xu Costas P Grigoropoulos Richard E Russo
Notes	NOT IN FILE
Journal	Journal of Heat Transfer
Volume	117
Year of Publication	1995
Pagination	708-715
Accession Number	52
Keywords	Thin Laser Layers Excimer Excimer laser Melting Layer Excimer laser Heat transfer Heat
Organizations	Laser Technologies Group Energy Storage and Distributed Resources Division
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