TY - JOUR
KW - Thin
KW - Laser
KW - Layers
KW - Excimer
KW - Excimer laser
KW - Melting
KW - Layer
KW - Excimer laser
KW - Heat transfer
KW - Heat
AU - Xianfan Xu
AU - Costas P Grigoropoulos
AU - Richard E Russo
AN - 52
BT - Journal of Heat Transfer
LA - eng
LB - Laser
N1 - <p>NOT IN FILE</p>
PY - 1995
SP - 708
EP - 715
T2 - Journal of Heat Transfer
TI - Heat transfer in excimer laser melting of thin polysilicon layers
VL - 117
ER -