Effect of ultraviolet light on fatigue of lead zirconate titanate thin-film capacitors

Publication Type
Journal Article
Authors
DOI
10.1063/1.112617
Abstract
Fatigue of Pb(Zr0.52Ti0.48)O3 (PZT) thin-film capacitors was studied under UV light (He-Cd laser, λ=325 nm). The remanent polarization of the PZT film capacitors increased upon light illumination. Fatigue resistance was also improved under UV light. During fatigue test, the change in polarization of PZT films upon UV light illumination increased gradually with cycling. These results were examined within the framework of the polarization screening model, which is suggested as an essential process for fatigue. This leads to a conclusion that more charged defects are involved in the fatigue process through internal screening of polarization.
Notes
cited By 48
Journal
Applied Physics Letters
Volume
65
Year of Publication
1994
Number
2
Pagination
254-256
ISSN Number
00036951
Keywords
Research Areas
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