Ion beam milling

Ma, Z, F Zavaliche, L Chen, J Ouyang, J Melngailis, A.L Roytburd, V Vaithyanathan, D.G Schlom, T Zhao, and Ramamoorthy Ramesh. "Effect of 90° domain movement on the piezoelectric response of patterned PbZr 0.2 Ti 0.8 O 3 SrTiO 3 Si heterostructures." Applied Physics Letters 87 (2005).

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