Performance Evaluation of Cleanroom Environmental Systems

Publication Type
Journal Article
Author
LBL Report Number
LBNL-53282
Abstract

This paper presents in-situ measurement results for energy and environmental performance of thirteen cleanroom systems located in the USA, including key metrics for evaluating cleanroom air system performance and overall electric power intensity. Comparisons with the IEST Recommended Practice (IEST-RP-CC012.1) are made to examine the performance of cleanroom air systems. Based upon the results, the paper discusses likely opportunities for improving cleanroom energy efficiency while maintaining effective contamination control. The paper concludes that there are wide variations in energy performance of cleanroom environmental systems, and that performance benchmarking can serve as a vehicle to identify energy efficient cleanroom design practices and to highlight important issues in cleanroom operation and maintenance.

Journal
Journal of the Illuminating Engineering Society
Volume
46
Year of Publication
2003
Number
3-Aug
Pagination
66-73
Call Number
LBNL-53282
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