%0 Journal Article
%A Peter Dudenas
%A Adam Z Weber
%A Ahmet Kusoglu
%B Journal of Applied Crystallography
%D 2020
%G eng
%N 6
%P 1484 - 1492
%R 10.1107/S160057672001304710.1107/S1600576720013047/ge5076sup1.pdf
%T Electric-field-intensity-modulated scattering as a thin-film depth probe
%V 53
%8 11/2020
%! J Appl Crystallography
%X <p><span>Grazing-incidence X-ray scattering is a common technique to elucidate nanostructural information for thin-film samples, but depth-resolving this nanostructure is difficult using a single or few images. An&nbsp;</span><span class="it"><em>in situ</em></span><span>&nbsp;method to extract film thickness, the index of refraction and depth information using scattering images taken across a range of incident angles is presented here. The technique is described within the multilayer distorted-wave Born approximation and validated using two sets of polymer thin films. Angular divergence and energy resolution effects are considered, and implementation of the technique as a general beamline procedure is discussed. Electric-field-intensity-modulated scattering is a general technique applicable to myriad materials and enables the acquisition of depth-sensitive information&nbsp;</span><span class="it"><em>in situ</em></span><span>&nbsp;at any grazing-incidence-capable beamline.</span></p>