%0 Conference Paper %K Sputter deposition %K Crystal orientation %K Platinum %K Film growth %K Lanthanum compounds %K Ferroelectric materials %K Lead compounds %K Capacitors %K Conductive films %K Lead zirconate titanate (PZT) %K Synthesis (chemical) %K Crystal microstructure %K Lanthanum strontium cobalt oxide %K Titanium oxides %K Ruthenium compounds %K Ion beam sputter deposition %K Pulsed laser ablation deposition %K Ruthenium dioxide %A O Auciello %A H.N Al-Shareef %A K.D Gifford %A D.J Lichtenwalner %A R Dat %A K.R Bellur %A A.I Kingon %A Ramamoorthy Ramesh %B Proceedings of the Materials Research Society Symposium - %D 1994 %G eng %I Materials Research Society, Pittsburgh, PA, United States %P 341-353 %S Materials Research Society Symposium - %T Review of orientation-microstructure-property relationships for PZT/metal or metal-oxide layered heterostructures %V 341