%0 Conference Paper %K Ferroelectric materials %K Ferroelectricity %K Thin film devices %K Random access storage %K CMOS integrated circuits %K Ferroelectric devices %K Interfaces (materials) %K Semiconducting silicon %K Ferroelectric capacitor %K Ceramic capacitors %K Semiconductor device structures %K Ferroelectric metal oxide heterostructures %A Ramamoorthy Ramesh %A J Lee %A V.G Keramidas %A D.K Fork %A S Ghonge %A E Goo %A O Auciello %B Proceedings of the Materials Research Society Symposium - %D 1994 %G eng %I Materials Research Society, Pittsburgh, PA, United States %P 431-443 %S Materials Research Society Symposium - %T Interfaces in ferroelectric metal oxide heterostructures %V 343