%0 Conference Paper %K thin films %K transmission electron microscopy %K lanthanum compounds %K Ferroelectric materials %K Epitaxial growth %K bismuth compounds %K High resolution transmission electron microscopy %K Lead compounds %K Ferroelectric thin films %K Crystal defects %K Phase interfaces %K Semiconducting silicon compounds %K Crystals %K Semiconducting films %K Crystal microstructure %A S.G Ghonge %A E Goo %A Ramamoorthy Ramesh %A R Haakenaasen %A D.K Fork %A Garratt-Reed G.W %B Proceedings - Annual Meeting, Microscopy Society of America %D 1994 %G eng %P 572-573 %T Epitaxial ferroelectric thin films %X Microstructure of epitaxial ferroelectric/conductive oxide heterostructures on LaAlO3 (LAO) and Si substrates have been studied by conventional and high resolution transmission electron microscopy. The epitaxial films have a wide range of potential applications in areas such as non-volatile memory devices, electro-optic devices and pyroelectric detectors.