%0 Conference Paper %K Cooling %K Deposition %K Thin films %K Annealing %K Laser ablation %K Electrodes %K Ferroelectric materials %K Lead compounds %K Crystal defects %K Lead zirconate titanate (PZT) %K Sol-gels %K Positron annihilation %K Titanium oxides %K Vacancy-related defects %A A Krishnan %A D.J Keeble %A Ramamoorthy Ramesh %A W.L Warren %A B.A Tuttle %A R.L Pfeffer %A B Nielsen %A K.G Lynn %B Proceedings of the Materials Research Society Symposium - %D 1995 %G eng %I Materials Research Society, Pittsburgh, PA, United States %P 129-134 %S Materials Research Society Symposium - %T Vacancy related defects in thin film Pb(ZrTi)O3 materials %V 361