%0 Conference Paper %K Thin films %K Electrodes %K Silicon %K Substrates %K Hysteresis %K Ferroelectric materials %K Lead compounds %K Grain size and shape %K X-ray diffraction analysis %K Lead zirconate titanate thin films %K Titanium oxides %K Ferroelectric switching behavior %A Michael Eatough %A Duane Dimos %A Bruce Tuttle %A William Warren %A Ramamoorthy Ramesh %B Proceedings of the Materials Research Society Symposium - %D 1995 %G eng %I Materials Research Society, Pittsburgh, PA, United States %P 111-116 %S Materials Research Society Symposium - %T Study of switching behavior in Pb(Zr,Ti)O3 thin films using X-ray diffraction %V 361