%0 Journal Article
%K Reliability
%K Deposition
%K Pulsed laser deposition
%K Transmission electron microscopy
%K Crystal growth
%K Ferroelectric materials
%K Ferroelectricity
%K Heterojunctions
%K Ferroelectric capacitors
%K Interfaces (materials)
%K Non-volatile storage
%K Capacitors
%K Semiconducting silicon
%K Low temperature phenomena
%K Conducting barrier stacks
%K High density nonvolatile memory (HDNVM)
%K Low temperature effects
%A A.M Dhote
%A S Madhukar
%A D Young
%A T Venkatesan
%A Ramamoorthy Ramesh
%A C.M Cotell
%A J.M Benedetto
%B Journal of Materials Research
%D 1997
%G eng
%I Materials Research Society
%P 1589-1594
%R 10.1557/JMR.1997.0218
%T Low temperature growth and reliability of ferroelectric memory cell integrated on Si with conducting barrier stack
%V 12