%0 Journal Article %K Optical properties %K Laser ablation %K Sapphire %K Energy gap %K Aluminum compounds %K Interfaces (materials) %K Secondary ion mass spectrometry %K Spectrophotometry %K X-ray diffraction analysis %K Electric conductivity of solids %K Titanium nitride %K Aluminum nitride %K Full width at half maximum (FWHM) %K Metallic superlattices %A V Talyansky %A R.D Vispute %A Ramamoorthy Ramesh %A R.P Sharma %A T Venkatesan %A Y.X Li %A L.G Salamanca-Riba %A M.C Wood %A R.T Lareau %A K.A Jones %A A.A Iliadis %B Thin Solid Films %D 1998 %G eng %I Elsevier %P 37-41 %R 10.1016/S0040-6090(97)00902-4 %T Fabrication and characterization of epitaxial AlN/TiN bilayers on sapphire %V 323