%0 Journal Article
%A A Stanishevsky
%A S Aggarwal
%A A.S Prakash
%A J Melngailis
%A Ramamoorthy Ramesh
%B Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
%D 1998
%G eng
%P 3899-3902
%T Focused ion-beam patterning of nanoscale ferroelectric capacitors
%V 16