%0 Journal Article
%A D.J Keeble
%A B Nielsen
%A A Krishnan
%A K.G Lynn
%A S Madhukar
%A Ramamoorthy Ramesh
%A C.F Young
%B Applied Physics Letters
%D 1998
%G eng
%P 318-320
%R 10.1063/1.121820
%T Vacancy defects in (Pb, La)(Zr, Ti)O3 capacitors observed by positron annihilation
%V 73
%X A study of vacancy-related defects in ferroelectric capacitors was performed using a variable energy positron beam (VEPB). Heterostructures of (Pb0.9La0.1)(Zr0.2Ti0.8)O 3 (PLZT) ferroelectric with La0.5Sr0.5CoO3 (LSCO) electrodes were deposited by pulsed laser deposition and the effects of oxygen deficiency studied using structures grown with 760 and 1×10-5Torr oxygen. The VEPB depth profile showed an increase in vacancy-related defects with increased oxygen nonstoichiometry. A study of LSCO and PLZT thin films was also performed. The formation of vacancy clusters in the LSCO top electrode, and VPb-VO defects in the PLZT layer, with increased oxygen deficiency is inferred. © 1998 American Institute of Physics.