%0 Journal Article
%K Thin films
%K Perovskite
%K Oxides
%K Electrodes
%K Etching
%K Ferroelectric materials
%K Lead compounds
%K Silicon wafers
%K Capacitors
%K Lead zirconate titanate (PZT)
%K Diffusion barriers
%K Diffusion coatings
%A S Aggarwal
%A I.G Jenkins
%A B Nagaraj
%A C Canedy
%A Ramamoorthy Ramesh
%A G Velasquez
%A L Boyer
%A J .T Jr
%B Integrated Ferroelectrics
%D 1999
%G eng
%I Taylor and Francis Inc.
%P 205-221
%R 10.1080/10584589908210173
%T Conducting diffusion barriers for integration of ferroelectric capacitors on Si
%V 25