%0 Conference Paper
%K Annealing
%K Mass spectrometry
%K Hydrogen
%K Degradation
%K Electric properties
%K Raman spectroscopy
%K Ferroelectric materials
%K Thin film devices
%K Strontium compounds
%K Capacitors
%K Semiconducting lead compounds
%K X-ray diffraction analysis
%K Ion scattering
%K Composition effects
%K Hydrogen annealing
%K Mass spectroscopy of recoiled ions
%K Pulsed ion beam surface characterization
%K Surface analysis
%A A.R Krauss
%A A Dhote
%A O Auciello
%A J Im
%A Ramamoorthy Ramesh
%A S Aggarwal
%B Integrated Ferroelectrics
%D 1999
%G eng
%I Gordon & Breach Science Publ Inc, Newark
%P 147-157
%R 10.1080/10584589908228464
%S Integrated Ferroelectrics
%T Studies of hydrogen-induced degradation processes in Pb(Zr1-xTix)O3 (PZT) and SrBi2Ta2O9 (SBT) ferroelectric film-based capacitors
%V 27