%0 Journal Article
%K Laser ablation
%K Surface roughness
%K Crystal structure
%K Phase transitions
%K Ferroelectric materials
%K Random access storage
%K Lead compounds
%K Molybdenum compounds
%K Lead zirconate titanate (PZT)
%K Thermal effects
%K Pulsed laser applications
%K Semiconducting silicon
%K Dielectric films
%K Electric conductivity of solids
%K Molybdenum silicide
%K Pulsed laser ablation (PLA)
%A S Madhukar
%A S Aggarwal
%A A.M Dhote
%A Ramamoorthy Ramesh
%A S.B Samavedam
%A S Choopun
%A R.P Sharma
%B Journal of Materials Research
%D 1999
%G eng
%P 940-947
%T Pulsed laser-ablation deposition of thin films of molybdenum suicide and its properties as a conducting barrier for ferroelectric random-access memory technology
%V 14