%0 Conference Paper
%K Thin films
%K Annealing
%K Substrates
%K Manganese
%K Lanthanum compounds
%K Ferroelectric materials
%K Permittivity
%K Semiconductor doping
%K Barium compounds
%K Magnesia
%K Antenna phased arrays
%K Phase shifters
%K Microstrip devices
%K Coupled microstrip phase shifters
%K Film thickness
%K Thin ferroelectric films
%A F.W Van Keuls
%A C.H Mueller
%A F.A Miranda
%A R.R Romanofsky
%A C.L Canedy
%A S Aggarwal
%A T Venkatesan
%A Ramamoorthy Ramesh
%A J.S Horwitz
%A W L Chang
%A W.J Kim
%B IEEE MTT-S International Microwave Symposium Digest
%D 1999
%G eng
%I IEEE, Piscataway, NJ, United States
%P 737-740
%T Room temperature thin film BaxSr1-xTiO3 Ku-band coupled microstrip phase shifters: effects of film thickness, doping, annealing and substrate choice
%V 2
%X We report on measurements taken on thirteen Ku-band coupled microstrip phase shifters (CMPS) using thin ferroelectric films of BaxSr1-xTiO3. This CMPS design is a recent innovation designed to take advantage of the high tunability and tolerate the high dielectric constant of ferroelectric films at Ku- and K-band frequencies. These devices are envisioned as a component in low-cost steerable beam phased array antennas. Comparisons are made between devices with differing film thickness, annealed vs. unannealed, Mn-doped vs. undoped, and also substrates of LaAlO3 and MgO.