%0 Journal Article
%K Thin films
%K Perovskite
%K Electrodes
%K Electric properties
%K Ferroelectric devices
%K Lead compounds
%K Silicon wafers
%K Capacitors
%K Ferroelectric properties
%K Diffusion barrier layers
%K Data storage equipment
%K Polysilanes
%K Ferroelectric capacitor structures
%K High density ferroelectric memories
%K Polysilicon plug
%A S Aggarwal
%A C Ganpule
%A I.G Jenkins
%A B Nagaraj
%A A Stanishevsky
%A J Melngailis
%A E Williams
%A Ramamoorthy Ramesh
%B Integrated Ferroelectrics
%D 2000
%G eng
%I Taylor and Francis Inc.
%P 213-225
%R 10.1080/10584580008222233
%T High density ferroelectric memories: Materials, processing and scaling
%V 28