%0 Journal Article
%A B.R Chalamala
%A Y Wei
%A R.H Reuss
%A S Aggarwal
%A S.R Perusse
%A B.E Gnade
%A Ramamoorthy Ramesh
%B Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
%D 2000
%G eng
%P 1919-1922
%T Stability and chemical composition of thermally grown iridium-oxide thin films
%V 18