%0 Conference Paper
%K Deposition
%K Pulsed laser deposition
%K Annealing
%K Hysteresis
%K Etching
%K Oxygen
%K Lanthanum compounds
%K Ferroelectric devices
%K Lead compounds
%K Capacitors
%K Crystal defects
%K Hysteresis loops
%K Pulsed laser applications
%K Partial pressure
%K Positrons
%K Oxygen deficient atmosphere
%K Positron depth profiling
%K Post growth annealing
%A T Friessnegg
%A B Nielsen
%A V.J Ghosh
%A S Aggarwal
%A D.J Keeble
%A E.H Poindexter
%A Ramamoorthy Ramesh
%B Proceedings of the Materials Research Society Symposium -
%D 2000
%G eng
%I Materials Research Society, Warrendale, PA, United States
%P 393-397
%S Materials Research Society Symposium -
%T Oxygen deficiency and vacancy formation in LSCO/PLZT/LSCO capacitors
%V 596