%0 Journal Article
%K Transmission electron microscopy
%K Stoichiometry
%K Scanning electron microscopy
%K Film growth
%K Electric properties
%K Thin film devices
%K Interfaces (materials)
%K Ferroelectric thin films
%K X-ray photoelectron spectroscopy
%K Magnetron sputtering
%K Recoil spectroscopy
%K Crystal microstructure
%K Composition effects
%K Ellipsometry
%K Capacitor interface
%K Time of flight ion scattering
%A A.R Krauss
%A O Auciello
%A A.M Dhote
%A J Im
%A S Aggarwal
%A Ramamoorthy Ramesh
%A E.A Irene
%A Yuan Gao
%A A.H Mueller
%B Integrated Ferroelectrics
%D 2001
%G eng
%I Gordon and Breach Science Publishers Inc.
%P 121-131
%T Studies of ferroelectric film growth and capacitor interface processes via in situ analytical techniques and correlation with electrical properties
%V 32