%0 Conference Paper %K Annealing %K Alumina %K Sapphire %K Manganese %K Permittivity %K Ferroelectric thin films %K Growth (materials) %K Barium compounds %K Antenna phased arrays %K Oscillators (electronic) %K Phase shifters %K Radio communication %K Ferroelectric microwave devices %K RF communications %K Tunable filters %K Tunable microwave components %K Tunable oscillators %K Microwave devices %A F.W Van Keuls %A R.R Romanofsky %A C.H Mueller %A J.D Warner %A C.L Canedy %A Ramamoorthy Ramesh %A F.A Miranda %B Integrated Ferroelectrics %D 2001 %G eng %P 1605/165-1616/176 %S Integrated Ferroelectrics %T Current status of thin film (Ba,Sr)TiO3 tunable microwave components for RF communications %V 34