%0 Journal Article %K Electrodes %K Multilayers %K Etching %K Epitaxial growth %K Field effect transistors %K Electric resistance %K Yttrium barium copper oxides %K Oxide electrodes %A A.G Schrott %A J.A Misewich %A D.W Abraham %A Ramamoorthy Ramesh %A V Nagarajan %B Materials Research Society Symposium - Proceedings %D 2001 %G eng %P F541-F546 %T Oxide electrodes for buried-channel field effect transistors %V 666