%0 Journal Article
%A A.M Dhote
%A O Auciello
%A D.M Gruen
%A Ramamoorthy Ramesh
%B Applied Physics Letters
%D 2001
%G eng
%P 800-802
%R 10.1063/1.1391237
%T Studies of thin film growth and oxidation processes for conductive Ti-Al diffusion barrier layers via in situ surface sensitive analytical techniques
%V 79