%0 Conference Paper
%K Strontium compounds
%K Ferroelectric devices
%K Lead compounds
%K Non-volatile storage
%K Capacitors
%K Ferroelectric memories
%K Size determination
%K Electrical testing
%K Ferroelectric nonvolatile memory devices (FeRAM)
%K Memory cell capacitors
%A T Schmitz
%A K Prume
%A S Tiedke
%A A Roelofs
%A T Schneller
%A U Kall
%A M Grossmann
%A R Waser
%A C Ganpule
%A A Stanishefsky
%A Ramamoorthy Ramesh
%B Integrated Ferroelectrics
%D 2001
%G eng
%P 163-172
%R 10.1080/10584580108015676
%S Integrated Ferroelectrics
%T Electrical measurements on capacitor sizes in the submicron regime for the characterization of real memory cell capacitors
%V 37