%0 Conference Paper
%K Oxidation
%K Thin films
%K Glass
%K X-ray Diffraction
%K X-ray photoelectron spectroscopy
%K Molybdenum
%K Desorption peak
%K Field emitter arrays
%K Partial oxidation
%K Thermal desorption spectroscopy
%K Ultraviolet photoelectron spectroscopy
%A B.R Chalamala
%A R.H Reuss
%A Y Wei
%A J.M Bernhard
%A E.D Sosa
%A D.E Golden
%A S Aggarwal
%A Ramamoorthy Ramesh
%B Proceedings of the Materials Research Society Symposium
%D 2001
%G eng
%P 353-358
%S Materials Research Society Symposium
%T Oxidation of molybdenum thin films and its impact on molybdenum field emitter arrays
%V 685
%@ 1558996214; 9781558996212