%0 Journal Article
%K Ferroelectric materials
%K Ferroelectric capacitors
%K Capacitors
%K Lead zirconate titanate (PZT)
%K Ferroelectric property
%K Chemical compositions
%K Damaged layers
%K Dielectric layer
%K Gallium impurity
%K Ion damage
%K Ion dose
%K Sub-100 nm
%K Radiation damage
%K Focused ion beams
%A A Stanishevsky
%A B Nagaraj
%A J Melngailis
%A Ramamoorthy Ramesh
%A L Khriachtchev
%A E McDaniel
%B Journal of Applied Physics
%D 2002
%G eng
%P 3275-3278
%R 10.1063/1.1489069
%T Radiation damage and its recovery in focused ion beam fabricated ferroelectric capacitors
%V 92
%X We studied the effect of ion damage on the properties of 50 keV Ga + focused ion beam fabricated lead-zirconate-titanate capacitors as a function of the ion dose. We observed significant modification in the chemical composition of the damaged layer due to loss of lead and oxygen, and gallium impurity accumulation. The 5-10 nm thick damaged layer becomes dielectric after annealing and does not recover its ferroelectric properties. This dielectric layer substantially reduces the actual volume of the ferroelectric material in sub-100 nm structures, and can affect their performance. © 2002 American Institute of Physics.