%0 Conference Paper
%K Oxidation
%K Transmission electron microscopy
%K Substrates
%K Film growth
%K Interfaces (materials)
%K Diffusion barrier
%K X-ray photoelectron spectroscopy
%K Ceramic materials
%K Dynamic random access memories (DRAM)
%K Electroceramic films
%K Ferroelectric memories
%K Ion scattering
%K Materials integration
%K Recoil spectroscopy
%A O Auciello
%A A.M Dhote
%A Ramamoorthy Ramesh
%A B.T Liu
%A S Aggarwal
%A A.H Mueller
%A N.A Suvarova
%A E.A Irene
%B Integrated Ferroelectrics
%D 2002
%G eng
%P 295-306
%R 10.1080/10584580215376
%S Integrated Ferroelectrics
%T Development of materials integration strategies for electroceramic film-based devices via complementary in situ and ex situ studies of film growth and interface processes
%V 46