%0 Journal Article %K Deposition %K Thin films %K Transmission electron microscopy %K Ions %K Oxides %K Substrates %K Oxide films %K Lanthanum compounds %K Computer simulation %K X-ray Diffraction %K Crystal lattices %K Molecular structure %K Crystal atomic structure %K Spectrometers %K Cubic face centered cubic structure %K Energy dispersive spectrometry %K High resolution lattice images %K Perovskite structure %A H Li %A L Salamanca-Riba %A Ramamoorthy Ramesh %A J.H Scott %B Journal of Materials Research %D 2003 %G eng %I Materials Research Society %P 1698-1704 %R 10.1557/JMR.2003.0233 %T Ordering in (La,Sr)(Al,Ta)O3 substrates %V 18