%0 Conference Paper %K Thin films %K Crystal structure %K Ferroelectric materials %K Dielectric materials %K Permittivity %K Magnetic domains %K 180° c-c domain wall %K 90° a-c domain wall %K Linear dielectric constant %K Nonlinear dielectric constant %K PZT thin films %K Scanning nonlinear dielectric microscopy %A Y Cho %A K Matsuura %A N Valanoor %A Ramamoorthy Ramesh %B Ferroelectrics %D 2003 %G eng %P 171-180 %R 10.1080/00150190390222961 %T Direct domain wall thickness measurement using scanning nonlinear dielectric microscopy %V 292 %X Using Scanning Nonlinear Dielectric Microscopy (SNDM) which has attained sub-nanometer resolution, we measured the linear dielectric constant of a-domains and c-domains in the (1,0,0) and (0,0,1) oriented PbZr 0.2 Ti 0.8 O 3 thin film and confirmed that the dielectric constant of a-domain is higher than that of c-domain. Next, we observed 90 domain walls (a-c domain walls) and 180 domain walls (c-c domain walls) and we obtained the minimum value of 180 c-c domain wall thickness was 1.87 nm and 90 a-c domain wall was 2.52 nm.