%0 Conference Paper %K Thin films %K Nanostructured materials %K Hysteresis %K Etching %K Ferroelectric materials %K Parameter estimation %K Lead compounds %K Wetting %K Pore size %K Electrostatic force microscopy %K Nanorods %K Precursors %K Tubes (components) %A Y Luo %A I Szafraniak %A V Nagarajan %A R.B Wehrspohn %A M Steinhart %A J.H Wendorff %A N.D Zakharov %A Ramamoorthy Ramesh %A M Alexe %A LaFan D.A %A Ayon A.A %A Madou M.J %A McNie M.E %B Materials Research Society Symposium - Proceedings %D 2003 %G eng %P 415-420 %T Ferroelectric lead zirconate titanate and barium titanate nanoshell tubes %V 782 %X

Wetting of the pore walls of porous templates is a simple and convenient method to prepare nanoshell tubes. Wafer-scale fabrication of ferroelectric lead zirconate titanate and barium titanate nanoshell tubes was accomplished by wetting porous silicon templates with polymeric precursors. The ferro- and piezoelectric properties of an individual ferroelectric nanoshell tube either of PZT or of BaTiO3 were electrically characterized by measuring the local piezoelectric hysteresis. A sharp switching at the coercive voltage of about 2 V was shown from the hysteresis loop. The corresponding effective remnant piezoelectric coefficient is about 90 pm/V. We have also prepared highly ordered arrays of free-standing ferroelectric nanoshell tubes obtained by partial etching of the silicon template. Such materials might be used as building blocks of miniaturized devices and could have a significant impact in the field of nano-electromechanical systems.