%0 Conference Paper
%K Thin films
%K Electrodes
%K Pyrolysis
%K Epitaxial growth
%K Silicon wafers
%K Capacitors
%K Electrical characteristics
%K Fatigue endurance
%K Low-temperature fabrication
%K Differential thermal analysis
%K Low temperature effects
%K Sol-gels
%A K Maki
%A B.T Liu
%A Y So
%A H Vu
%A Ramamoorthy Ramesh
%A J Finder
%A Z Yu
%A R Droopad
%A K Eisenbeiser
%B Integrated Ferroelectrics
%D 2003
%G eng
%P 19-31
%R 10.1080/10584580390254088
%S Integrated Ferroelectrics
%T Low-temperature fabrication of epitaxial and random-oriented Pb(Zr,Ti)O 3 capacitors with SrRuO 3 electrodes on Si wafers
%V 52