%0 Journal Article %K Microstructure %K Thin films %K Pulsed laser deposition %K Transmission electron microscopy %K Perovskite %K Ion beams %K Lanthanum compounds %K Epitaxial growth %K Single crystals %K X-ray Diffraction %K Dislocations (crystals) %K Barium titanate %K Coalescence %K Metallic films %K Shear stress %K Ion-beam milling %K Semiconductor films %K Threading dislocations %A I.B Misirlioglu %A A.L Vasiliev %A M Aindow %A S.P Alpay %A Ramamoorthy Ramesh %B Applied Physics Letters %D 2004 %G eng %I American Institute of Physics Inc. %P 1742-1744 %R 10.1063/1.1664035 %T Threading dislocation generation in epitaxial (Ba,Sr)TiO3 films grown on (001) LaAlO3 by pulsed laser deposition %V 84