%0 Journal Article %K microstructure %K thin films %K pulsed laser deposition %K transmission electron microscopy %K Perovskite %K ion beams %K lanthanum compounds %K Epitaxial growth %K Single crystals %K X ray diffraction %K Dislocations (crystals) %K Barium titanate %K Coalescence %K Metallic films %K Shear stress %K Ion-beam milling %K Semiconductor films %K Threading dislocations %A I.B Misirlioglu %A A.L Vasiliev %A M Aindow %A S.P Alpay %A Ramamoorthy Ramesh %B Applied Physics Letters %D 2004 %G eng %I American Institute of Physics Inc. %P 1742-1744 %R 10.1063/1.1664035 %T Threading dislocation generation in epitaxial (Ba,Sr)TiO3 films grown on (001) LaAlO3 by pulsed laser deposition %V 84 %X The epitaxial growth of (Ba,Sr)TiO3 (BST) films on (001) LaAlO3 by pulsed laser deposition and dislocation structures of the films were investigated. The BST films were deposited by PLD from a sintered BST target using growth conditions that results in high quality epitaxial films. The result show that the treading dislocations are not generated as the result of half-loop climb from the deposit surface. It was found that the dislocation were formed when misfit dislocations are forced away from the interface during island coalescence.