%0 Journal Article %K Electrodes %K Scanning electron microscopy %K Nanostructured materials %K Elasticity %K Computer simulation %K Single crystals %K Strontium compounds %K Heterojunctions %K Ferroelectric thin films %K Capacitors %K Semiconducting lead compounds %K Piezoresponse %K Finite element method %K Epitaxial heterostructures %K Nanostructured ferroelectric films %K Mathematical models %A J.-H Li %A L Chen %A V Nagarajan %A Ramamoorthy Ramesh %A A.L Roytburd %B Applied Physics Letters %D 2004 %G eng %P 2626-2628 %R 10.1063/1.1695641 %T Finite element modeling of piezoresponse in nanostructured ferroelectric films %V 84 %X The converse piezoresponse measured by the surface displacement of ferroelectric islands, with lateral size changing from a nanoscale to a continuous film was modeled by using three-dimensional finite element method. It was shown that the piezodeformation of the islands results in a local deformation of a substrate in the vicinity of island. The piezoresponse of different size island capacitors with PbZr 0.5Ti 0.5O 3/SrTiO 3/Si and PbZr 0.2Ti 0.8O 3/SrTiO 3 heterostructures was also calculated. The patterning thin ferroelectric films into discrete islands was an effective way to release the constraint imposed by a substrate.