%0 Journal Article
%K electrodes
%K scanning electron microscopy
%K nanostructured materials
%K elasticity
%K Computer simulation
%K Single crystals
%K Strontium compounds
%K Heterojunctions
%K Ferroelectric thin films
%K Capacitors
%K Semiconducting lead compounds
%K Piezoresponse
%K Finite element method
%K Epitaxial heterostructures
%K Nanostructured ferroelectric films
%K Mathematical models
%A J.-H Li
%A L Chen
%A V Nagarajan
%A Ramamoorthy Ramesh
%A A.L Roytburd
%B Applied Physics Letters
%D 2004
%G eng
%P 2626-2628
%R 10.1063/1.1695641
%T Finite element modeling of piezoresponse in nanostructured ferroelectric films
%V 84
%X The converse piezoresponse measured by the surface displacement of ferroelectric islands, with lateral size changing from a nanoscale to a continuous film was modeled by using three-dimensional finite element method. It was shown that the piezodeformation of the islands results in a local deformation of a substrate in the vicinity of island. The piezoresponse of different size island capacitors with PbZr 0.5Ti 0.5O 3/SrTiO 3/Si and PbZr 0.2Ti 0.8O 3/SrTiO 3 heterostructures was also calculated. The patterning thin ferroelectric films into discrete islands was an effective way to release the constraint imposed by a substrate.