%0 Journal Article
%K Sputtering
%K Electric potential
%K Hysteresis
%K Atomic force microscopy
%K Polarization
%K Ferroelectric devices
%K Ferroelectric capacitors
%K Ferroelectric thin films
%K Capacitors
%K Resistors
%K Electric conductivity
%K Polycrystalline materials
%K Noise levels
%K Polarization hysteresis
%K Switchable pulse polarization
%K Data reduction
%K Extrapolation
%K Reactive ion etching
%A S Prasertchoung
%A V Nagarajan
%A Z Ma
%A Ramamoorthy Ramesh
%A J.S Cross
%A M Tsukada
%B Applied Physics Letters
%D 2004
%G eng
%P 3130-3132
%R 10.1063/1.1707221
%T Polarization switching of submicron ferroelectric capacitors using an atomic force microscope
%V 84