%0 Journal Article %K Single crystals %K Piezoelectricity %K Ferroelectric thin films %K Electric field effects %K Metallorganic chemical vapor deposition %K Piezoelectric constants %K Vectors %K Elastic moduli %K Full width at half maximum (FWHM) %K Piezoresponse microscopy %K Substrate-clamped films %K Lithography %K Matrix algebra %A J Ouyang %A S.Y Yang %A L Chen %A Ramamoorthy Ramesh %A A.L Roytburd %B Applied Physics Letters %D 2004 %G eng %P 278-280 %R 10.1063/1.1771463 %T Orientation dependence of the converse piezoelectric constants for epitaxial single domain ferroelectric films %V 85 %X The general expressions for the effective piezoelectric constants for substrate-clamped films as function of film orientation were discussed. The piezoelectric constants of films with a tetragonal crystallographic structure were calculated for typical orientations. The piezoelectric constants were measured experimentally for single domain ferroelectric Pb(Zr 0.2Ti 0.8)O 3 thin films. The theoretical results were found to be in good agreement with the experimental observations.