%0 Journal Article %K Thin films %K Pulsed laser deposition %K Molecular beam epitaxy %K Transmission electron microscopy %K Film growth %K Ferroelectric materials %K Bismuth compounds %K Permittivity %K Piezoelectricity %K Electron diffraction %K Actuators %K Piezoelectric materials %K Microelectromechanical devices %K Hysteresis loops %K X-ray diffraction analysis %K Piezoelectric coefficients %K Compressive stress %K Electromagnetic wave polarization %K Heteroepitaxial growth %K Pulsed remnant polarization %K Thermal stress %A J Wang %A H Zheng %A Z Ma %A S Prasertchoung %A M Wuttig %A R Droopad %A J Yu %A K Eisenbeiser %A Ramamoorthy Ramesh %B Applied Physics Letters %D 2004 %G eng %P 2574-2576 %R 10.1063/1.1799234 %T Epitaxial BiFeO 3 thin films on Si %V 85