%0 Journal Article
%K Thin films
%K Pulsed laser deposition
%K Silicon
%K Zirconium
%K Epitaxial growth
%K Random access storage
%K Lead compounds
%K Silicon wafers
%K Capacitors
%K Microelectromechanical devices
%K Metallorganic chemical vapor deposition
%K Lead zirconate titanate (PZT)
%K Liquid delivery MOCVD
%K LSCO/PZT/LSCO capacitors
%K SrTiO3 template layers
%K Zr(dmhd)4
%K Ferroelectric ceramics
%A S Yang
%A B Liu
%A J Ouyang
%A V Nagarajan
%A V.N Kulkarni
%A Ramamoorthy Ramesh
%A J Kidder
%A R Droopad
%A K Eisenbeiser
%B Journal of Electroceramics
%D 2005
%G eng
%P 37-44
%R 10.1007/s10832-005-6582-4
%T Epitaxial Pb(Zr,Ti)O 3 capacitors on Si by liquid delivery metalorganic chemical vapor deposition
%V 14