%0 Journal Article %K Deposition %K Thin films %K Hysteresis %K Atomic force microscopy %K Polarization %K Epitaxial growth %K Ferroelectricity %K Piezoelectric devices %K Metallorganic chemical vapor deposition %K Lead-free ferroelectric %K Perovskite phase thin films %K Systematic control %K Phase equilibria %A S.Y Yang %A F Zavaliche %A L Mohaddes-Ardabili %A V Vaithyanathan %A D.G Schlom %A Y.J Lee %A Y.H Chu %A M.P Cruz %A Q Zhan %A T Zhao %A Ramamoorthy Ramesh %B Applied Physics Letters %D 2005 %G eng %R 10.1063/1.2041830 %T Metalorganic chemical vapor deposition of lead-free ferroelectric BiFeO 3 films for memory applications %V 87