%0 Conference Paper
%K Sensors
%K Silicon
%K Lead compounds
%K Ferroelectric films
%K MEMS
%K Piezoelectric materials
%K Epitaxial films
%K Si substrates
%K Orientation dependence
%K Piezoelectric constant
%K Sensor devices
%A J Ouyang
%A Ramamoorthy Ramesh
%A A.L Roytburd
%B Proceedings of the Materials Research Society Symposium
%D 2005
%G eng
%P 125-130
%S Materials Research Society Symposium
%T Effective direct piezoelectric constants in epitaxial ferroelectric films as MEMS sensors
%V 881
%@ 1558998357; 9781558998353