%0 Conference Paper
%K sensors
%K silicon
%K Lead compounds
%K Ferroelectric films
%K MEMS
%K Piezoelectric materials
%K Epitaxial films
%K Si substrates
%K Orientation dependence
%K Piezoelectric constant
%K Sensor devices
%A J Ouyang
%A Ramamoorthy Ramesh
%A A.L Roytburd
%B Materials Research Society Symposium Proceedings
%D 2005
%G eng
%P 125-130
%T Effective direct piezoelectric constants in epitaxial ferroelectric films as MEMS sensors
%V 881
%@ 1558998357; 9781558998353
%X Following our previous work on the converse piezoelectric constant-d 33.fC in epitaxial ferroelectric films for MEMS actuator applications', the orientation dependence of the direct piezoelectric constants d33,fD, d31.fD and d 33,fD are generally formulated, which can help to predict and optimize the performance of piezoelectric MEMS sensor devices based on ferroelectric thin films. Numerical results are obtained and discussed for Pb(ZrxTi1-x)O3 thin films grow on Si substrates with various compositions and structures. © 2005 Materials Research Society.