%0 Journal Article %K Substrates %K Strontium compounds %K Lead compounds %K Piezoelectric materials %K Piezoelectric properties %K Epitaxial PZT films %K Substrate constraints %A D.M Kim %A C.B Eom %A V Nagarajan %A J Ouyang %A Ramamoorthy Ramesh %A V Vaithyanathan %A D.G Schlom %B Applied Physics Letters %D 2006 %G eng %R 10.1063/1.2185614 %T Thickness dependence of structural and piezoelectric properties of epitaxial Pb(Zr 0.52Ti 0.48)O 3 films on Si and SrTiO 3 substrates %V 88