%0 Journal Article %K Thin films %K Mass spectrometry %K Perovskite %K Film growth %K Morphology %K Epitaxial growth %K Complex oxides %K Surface treatment %K Substrate surface %K Time-of-flight mass spectroscopy %K Basic solutions %K Chemical sensitivity %K Crystal surfaces %K Lattice parameters %K Perovskite type oxides %K Pseudocubic %K Scandates %K Selective wet etching %K Single termination %K Spectroscopy measurements %K Time of flight %K Wet etching %A J.E Kleibeuker %A G Koster %A W Siemons %A D Dubbink %A B Kuiper %A J.L Blok %A C.-H Yang %A J Ravichandran %A Ramamoorthy Ramesh %A J.E Elshof %A D.H.A Blank %A G Rijnders %B Advanced Functional Materials %D 2010 %G eng %P 3490-3496 %R 10.1002/adfm.201000889 %T Atomically defined rare-earth scandate crystal surfaces %V 20 %X {The fabrication of well-defined, atomically sharp substrate surfaces over a wide range of lattice parameters is reported, which is crucial for atomically regulated epitaxial growth of complex oxide heterostructures. By applying a framework for controlled selective wet etching of complex oxides on the stable rare-earth scandates (REScO3)