%0 Journal Article %K Thin films %K Perovskite %K Lattice constants %K Substrates %K Oxide films %K Quality control %K Lanthanum compounds %K Epitaxial growth %K Single crystals %K Degrees of freedom (mechanics) %K Strontium titanates %K Heterojunctions %K Aluminum compounds %K Transition metal oxides %K Interfaces (materials) %K Condensed matter physics %K Gallium compounds %K Metal testing %K Neodymium compounds %K Rare earths %K Surface treatment %K Tantalum compounds %K Tensile strain %K Transition metals %K Atomic flatness %K Atomically flat surface %K Chemical homogeneity %K High quality epitaxial thin films %K Layer-by-layer fabrication %K Semiconductor electronics %K Single-crystal substrates %K Technological applications %A A Biswas %A C.-H Yang %A Ramamoorthy Ramesh %A Y.H Jeong %B Progress in Surface Science %D 2017 %G eng %I Elsevier Ltd %P 117-141 %R 10.1016/j.progsurf.2017.05.001 %T Atomically flat single terminated oxide substrate surfaces %V 92